垂直腔面发射红外激光器的研究-机械工程专业论文.docx

摘 要 论文题目为垂直腔面发射红外激光器的研究，主要是设计出了波长为 980nm 的垂直腔面发射激光器。VCSEL 具有体积小、发散角小、阀值电流低、可实现 光纤耦合、利于二维集成等特点。激光器具有的上述特点以及其独特的出光方式， 使得该器件在实际的应用中具有很好的发展前景。在论文中，主要是通过深入的 理论分析来研究垂直腔面发射红外激光器的原理以及具体的制作流程，具体内容 如下： 首先，在反射镜的结构设计中，采用的是分布布拉格反射镜作为垂直腔面发 射激光器的反射镜，这种反射镜可以使反射率达到 99%以上。在光腔的设计中， 主要是设计光腔的长度以及在有源区中采用了多量子结构。氧化限制层的设计 中，首先是对限制层的结构进行分析，然后详细地阐述了该层的作用。 其次，在第三章中主要阐述了制作的工艺流程，工艺流程主要分为：湿法腐 蚀工艺、氧化工艺以及欧姆接触。此外，在外延生长的过程中，主要是采用了分 子束外延技术的方法来完成生长。 最后，对研制出的激光器进行测试，在测试过程中，主要是通过有限元对激 光器进行热分析以及对激光器的光电特性进行测试。 关键字：分布布拉格反射镜；量子阱；氧化限制层；ANASYS 模拟 ABSTRACT The topic of the essay is the study on vertical cavity surface emitting infrared laser. In this essay, the wavelength of laser is 980 nm. The VCSEL has many advantages. In the first, both of the volume and divergence angle are small. In the second, its threshold current is low. In the third, it benefitsthe realization of fiber coupling and two dimensional integration. Because of the whole characteristics and unique way of light, there are good prospects for development of VCSEL in practice. This essay studied the principle and producing process about the vertical cavity surface emitting infrared laser. So the specific contents are as follows. Firstly, I designed the structure of VCSEL. I must look for a suitable structure for VCSEL in the designing process. So I selected distributed Bragg reflectors in the essay. The reflectivity of this reflector is over 99%. At the aspect of design in optical cavity, I designed its length and used multiple quantum structure for active area. In the design of oxide-confining region, I selected structure of limiting lager and elaborated its function in the detail. Secondly, I elaborated technological process. It is divided into: the wet etching process oxidation process and contact. Besides, I used epitaxial techniques of molecular beam to finish the epitaxial wafer. In the end, I tested my laser by the thermal finite element analysis and electro-optical property. Key words: distributed Bragg reflectors, quantum well, oxide-co