fecosinativeoxide多层膜和ecobo颗粒膜的高频软磁特性.docx

优秀毕业论文 精品参考文献资料 摘要因此残留在晶格间隙或晶界处的 摘要 因此残留在晶格间隙或晶界处的B逐渐增多，使薄膜内的残留应力逐渐增大， 从而使薄膜材料的软磁性变差。 4 研究了薄膜厚度对材料软磁性的影响，发现只有在膜厚为～150 nm时样品获得 好的软磁性能。这可以理解为：在样品太薄时，表面和界面效应的影响，使材 料4rcM,降低，矫顽力变大；薄膜太厚时，颗粒尺寸变大以及退磁场效应都会 使软磁性变差。 5 ＼，、／ 研究了氧气流量比R02对软磁性的影响，结果表明：在P=80 W条件下，获得 好的软磁性的RD2的范围(O．4％～4．1％)比40 W下的宽，在实际样品制备工作中 有较大的优势。 ，L／L，L 6 ) 典型样品：在P=40 W条件下制备的FeCoB—O颗粒膜(R02=1．3％)有很高的 电阻率P=3638 nQ·cm，在频率厂2 GHz范围内，／a，~146，且铁磁共振频率石 =3．0 GHz：而在P=80 W条件下制备的FeCoB．O颗粒膜(R02=O．8％)具有 很高的铁磁共振频率‘=4．74 GHz。 AbstractAbstract Abstract Abstract Recent develops in electronic devices have led to an urgent need for further miniaturization and higher frequency operation of magnetic devices．One of the important properties of magnetic materials required for such applications is hi gh permeability at high frequency,which is limited by eddy current loss and ferromagnetic resonance(FMR)frequency．To produce a soft magnetic thin film with excellent∥-fresponse，the film must have not only high electrical resistivity∽)，but also large saturation magnetization(4zcM5)and appropriate in—plane uniaxial ani sotropy field(风)SO as to effectively suppress eddy current loss and to possess high ferromagnetic resonance(FMR)frequency石．Metal—insulator granular films have demonstrated good soft magnetic properties and high resi stivities due to the exchange coupling between granules，and were extensively studied．However,it is only at metal volume fractions approaching percolation threshold that soft magnetic properties are obtained，which leads to the decrease of effective saturation magnetization in proportion to the increase of oxide fraction．Recently，a newly introduced discontinuous metal／native—oxide multilayer structure，which has been exposed in situ to oxygen to form oxide interface layers，can significantly improve the soft magnetic properties and high frequency characteristics，because the oxide layers exhibit room temperature ferromagnetism．The excellent soft magnetic properties imply that the FeCoSi／native—oxide mult