高频响音圈电机的复杂迟滞混合建模与控制分析.pdfVIP

高频响音圈电机的复杂迟滞混合建模与控制研究 Abstract Voice coil motor (VCM) is a directly drive linear motor, which has the characteristics of simple structure, small size and good force characteristics,and it avoids large inertia and long mechanical hysteresis time in the traditional screw. VCM has the advantages of high frequency response, high acceleration and high positioning accuracy, so it is widely used in the field of ultra-precision machining, and semiconductor bonding.With the continuous improvement of the technology requirements in these areas, voice coil motor is required to work in the state of high-frequency response more and more frequently.For example the bonding rate of the first generation bonder can achieve 10 lines / s，the bonding rate of the second-generation bonder can achieve 25 lines / s， and in the future, the bonding rate of the third-generation bonder will achieve 40 lines / s. However, a number of studies of domestic and foreign scholars show that there is obviously complex hysteresis phenomenon in the high frequency response in voice coil motor. This complex hysteresis phenomenon seriously affects the positioning accuracy and the tracking accuracy of voice coil motor, and it may produce chattering which causes the system instability. At this background, with the support of the National Natural Science Foundation, this paper have done deeply research of the complex hysteresis of the high-frequency response voice coil motor, and the main contents are as follows: 1) The structure of the voice coil motor, and the principle of mechanical and electromagnetic are introduced.The simple transfer function between output displacement and input voltage in voice coil motor is derived (mathematical