薄膜生长的基本过程..ppt

* * 适用于临界核比较大的条件下 * 随成核功的不同(如缺陷和平台处)，成核率与温度的关系不一样 Ea很大时，欠饱和也可以成核: 同之前的结论 * * P677 f(t)是转换分数（即生长部分与总的部分的比率）, The vocabulary of polycrystalline film formation, particularly terms such as nucleation, growth, and coalescence, has a familiar ring in the metallurgical literature of solid-state phase transformations. For example, a cold worked metal matrix transforms by nucleation of recrystallized grains (islands) followed by growth, thus consuming the surrounding matrix so that there is less area available for new nuclei. During recrystallization one region will start ahead of others because of some favorable local composition, temperature, defect, or bias in the system. Then nucleation occurs elsewhere, and later somewhere else, while growth continues independently in regions of prior nucleation. The situation is much like rain droplets falling on a pond. Where rain impinges on the pond, surface wave nuclei are created. The circular ripples grow outward and begin to impinge on one another. When all of the prior untransformed matrix disappears by grain growth and impingement or coalescence, recrystallization is complete. So, too, for grain formation during thin-film formation. It should be noted that the Avrami equation strictly applies to closed systems transforming under conditions where there is no matter exchange with the surroundings. Inclusion of the adatom ring apparently extends the equations validity to open systems. * 三维情况：CoSi2的相变 * Coalescence of islands due to (a) Ostwald ripening, (b) sintering, (c) cluster migration. 烧结过程是通过原子的表面扩散或体扩散进行 * 05.06 * 原子团周边的增原子浓度与其它区域不一样，其它区域可以看成处于平衡，其浓度不变 * 存在”上坡扩散” * 某时刻入射原子流停止，原子团的长大与时间的关系 * 05.04 * 一般以表面扩散的方式 可用于测量扩散系数 * Coalescence occurs as a result of collisions between separate island-like crystallites (or droplets) as they execute random motion. Evidence provided by the field ion microscope, which has the capability of resolving individual atoms, has revealed the migration of dimer and trimer clusters. Electron micr