基于LabVIEW的椭圆偏振技术及在检测不锈钢着色膜中的应用-物理电子学专业论文.docxVIP

Classified Index: TH744.2 U.D.C: 681.785.235 Dissertation for the Master Degree of Engineering LABVIEW-BASED ELLIPSOMETRY AND APPLICATIONG OF MEASURE STAINLESS STEEL COLOR FILM Candidate: Lai Xiaoying Supervisor: Prof. yaoyong Academic Degree Applied for: Master of Engineering Specialty: Physical Electronics Affiliation: Shenzhen Graduate School Date of Defence: December, 2008 Degree-Conferring-Institution: Harbin Institute of Technology 摘 要 椭圆偏振检测是通过分析偏振光在待测物表面反射前后偏振状态的改 变来获得待测物表面所镀膜层的厚度和折射率的一种光学检测方法。 LabVIEW 是一种基于图形化编程语言的检测系统软件开发平台。本文就是 利用 LabVIEW 在仪器控制方面的优势，设计了一套基于 LabVIEW 控制的 消光式椭圆偏振测量