塑封功率晶体管早期失效数据分析与对策-软件工程专业论文.docxVIP

A A B S T R A C T 8 . D isc u ss the e au se o f e arly failux e in the e o ur se o f e h iP fab rie atio n ，in e lu d in g the raw an d P ro e e sse d m ate rials o f w a fer an d th e P o lish in g re a g e n t e te .; th e d isfig ure m e nis o f sm a ll h o le /A 1 sP e e k le/ro w/ etc h in g ; th e P ro c e ss P aram e te r o f P a ssiv atio n an d P o lishin g : th e v o ltag e v a lu e o f th。: d e v ic e : th e lo e atio n o f th e d ie in the w afe r: the P o llutio n fro m th e w a fer，a n d 50 o n ; 9 . D isc u ss the c au se o f e arl y failux e in the c o ur se o f the d e sign ，foc u sin g o n th e in flu e n c e o f the inn e r d io d e ; 10 . P roP o se P rojeets to im Prove the reliab ility of th e P lastie en eap su lated P ow er b iP o lar tra n sisto r ac e o rd in g to th e an a ly sis o f failu re c au se s : 1 1 . P ro d u c e fo llo w in g im P ro v e d P ro c e ss，an d d o c o m P 硕 so n an a ly sis. T h e re al d ata 15 an a ly z e d Wi th stat istic aP P ro a e h in this P aP e r; the situ atio n o f “data v acuulll，，and P rev alenee of “subj eetiv e judgm ents，，15 resolv ed to a larg e extent thro u g h the w o rk .A flat ro o f to im P ro v e the q u ality o f o u r P ro d u etio n is P ro v id ed . K ey w o r d s: P la stie E n e aP su late d P o we r B IP o lar T ran sisto r: R ate o f failur e : S tatistie s : An aly siS: R eliab ility IV 目 目 录 目 录 第 一章 绪论 .......................................................................................................……1 1.1 塑封 功率 晶体 管 的发 展 ....................................·····························，··············……2 1.2 功率 晶体 管 的结构和 制 造 过程 .........................................................……，....……3 1.2 .1 功率 晶体管 的结构 .............................··..··································，··············……3 1.2 .2 重 掺 扩 散过 程 二，......................................................……，...······················……3 1.2.3 芯 片 制 造过 程 ....................................