离子束纳米加工技术.ppt.pptVIP

Faerie Vacuum * Accelerator Laboratory, Wuhan University Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum 离子束纳米加工技术Ion Beam Nanofabrication Processing 付德君 Dejun Fu 宜昌后皇真空科技有限公司 Yichang Faerie Vacuum Tech Co. Ltd. 等离子体沉积技术 (Plasma vapor deposition, PVD) 数控切削刀具超硬涂层 Hard coatings on cutting tools: TiAlN, TiSiN, TiBN, nanocomposite coatings 精密模具镀层 Endurance coatings on molds: CrN, AlCrN, CrWN 汽车活塞环替代电镀铬层 Anti-wear coatings on piston rings replacing galvanic coatings: CrN, CrWN, DLC 多弧离子镀与磁控溅射镀膜机 Multi-arc ion plating magnetron sputtering systems 离子束纳米加工技术 Ion beam nano-processing 超浅结离子注入 Low energy cluster ion implanter for ultra-shallow junction IC fabrication 离子束亚纳米抛光 Ion beam smoothing at sub-nano scale Outline of company Provincial R D center Provincial Center Intl Cooperation Suzhou? Chendgu? Shenzhen factory Yichang factory 后皇公司 Faerie company Target Technical Product Physical vapor deposition 微钻?0.15 拉刀 Products PVD活塞环、模具涂层 ?130 模具 活塞环 模具 ?170 纺织钢领 丝锥 零部件涂层 Ion beam processing 离化器 离子源 MFC 分束器 聚焦 加速 分子泵 偏转磁铁 分子泵 电源 电控 分子泵 聚焦 束流控制 扫描 光栏 束流监测 团簇离子装置 ~ Thank you ~ Faerie Vacuum * Accelerator Laboratory, Wuhan University Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum Faerie Vacuum