Wet Bulk Micromachinig湿体微加工.pptVIP

Wet Bulk Micromachining – ;;;Manufacturing Processes;Micromachining;;Etching Features;Bulk Silicon Etching: Examples;Wet Silicon Etching: Examples;;;Miller Indices;Determining Miller Indices;;Single Crystal Silicon Wafers;Standard 100 mm Wafers;Wafers Used in MultiMEMS;;Isotropic Wet Etching of Silicon;Isotropic Etching of Silicon: Etchants;;Isotropic Etching of Glass;;Anisotropic Wet Etching of Silicon;Etching Setup;Anisotropic Etching of Silicon: Etchants;Overall: Si + 2OH– + 2H2O →  → SiO2(OH)22– + 2H2 (gas);Anisotropic Etching of (100)-Si;Cavity Geometry for (100)-Si;;;Cavity