Article扫描电子显微镜图像漂移的实时矫正方法Real-timecorrection.PDFVIP

Opto-Electronic Engineering Article 光 电 工 程 2018 年，第45 卷，第 12 期 DOI: 10.12086/oee.2018.180198 扫描电子显微镜图像漂移的 实时矫正方法 徐 伟 1 ，谷 森 1 ，储成智 1 ，靳振伟 1 ，汝长海 1,2* 1 215021 2 215021 摘要：为解决扫描电子显微镜(SEM) 由于电子束漂移、电磁干扰等原因导致的图像漂移问题，提出基于 ORB 结合 PROSAC 的图像漂移矫正算法。首先采用ORB 算法对基准图像和实时图像进行特征检测，然后利用汉明距离与交叉 匹配实现特征的初匹配，再结合RANSAC 的优化算法PROSAC 计算帧间的单应矩阵，利用单应矩阵映射剔除外点后 重新迭代计算出最终的精确单应矩阵，最后利用单应矩阵的透视变换实现SEM 图像漂移实时矫正。通过实验证明，该 算法不仅精度高，而且能够满足SEM 实时处理的要求。 关键词：扫描电子显微镜；图像漂移；单应矩阵；矫正 中图分类号：O436.3；TP391 文献标志码：A 引用格式：徐伟，谷森，储成智，等. 扫描电子显微镜图像漂移的实时矫正方法[J]. 光电工程，2018 ，45(12): 180198 Real-time correction of image drift in scanning electron microscope 1 1 1 1 1,2* Xu Wei , Gu Sen , Chu Chengzhi , Jin Zhenwei , Ru Changhai 1Robotics and Microsystems Center of Soochow University, Suzhou, Jiangsu 215021, China; 2Collaborative Innovation Center of Suzhou Nano Science and Technology, Suzhou, Jiangsu 215021, China Abstract: In order to solve the problem of imaging drift in scanning electron microscope (SEM) that caused by electron beam drift, electromagnetic interference and other reasons, an image shift correction algorithm based on ORB (oriented FAST and rotated BRIEF) combing the PROSAC (progressive sample consensus) is proposed in this paper. Firstly, the ORB algorithm is used to detect the feature between the reference image and real-time image. Then the initial matching of the feature is implemented by using the Hamming distance and cross-matching. More- over, the RANSAN (random sample consensus) optimization algorithm PROSAC is used to calculate the homogra- phy matrix between frames and the final exact homography matrix is re-iterated after eliminating exterior point. Fi-