Stitching Interferometer for large plano optics using a standard interferometer英文电子资料.pdfVIP

Stitching interferometer for large piano optics using a standard interferometer Michael Bray Cilas, 8 avenue Buffon, Z.I. La source, 45063 Orleans Cédex, France. ABSTRACT The manufacture ofmodern optical components often requires the use ofhigh performance interferometers, usually based on phase-shifting techniques. However, there is currently no commercial phase-shifting interferometer having the capacity to measure large parts, such as those found in Inertial Confmement Fusion Lasers (NIF and MégaJoule), and other large systems, with the required high spatial resolution (tenths of a millimetre) In order to circumvent the restrictions on the size of standard interferometers, we have designed and built a stitching interferometer for large plano surfaces, using a standard commercial small diameter phase-shifting interferometer. The system is completely automated, using a PC computer to acquire and stitch measurements together to produce the original large surface. The advantages of this technique are low cost, small size, and preservation of spatial resolution. Also, smaller propagation distance means better handling ofthe smaller spatial periods. One such system has been in actual use for the characterisation oflarge size mirrors (400 x 600 mm) since December 1994. In this paper, we shall look at the design of the system and produce, as an example, actual measurements performed on a PHEBUS laser slab polished more than a decade ago. The interferogram shows extraordinary (and beautiful) features never seen before in such detail. Keywords: interferometry, stitching interferometry, subaperture, large components, high resolution