压电陶瓷微致动器在计算机硬盘磁道定位机构中的应用-应用科学学报.PDFVIP

18　 2 V o l. 18, N o. 2 　 2000 6 JO U RN A L O F A P P LIED SCIEN CE S June 2000 　　: 0255 8297 2000) 02 0104 05 1 1 1 1 1 2 2 2 李国荣 , 陈大任 , 张　申 , 沈　卫, 殷庆瑞 , 毕　超 , 郭　伟 , 郑广德 1. , 　200050; 2. , 　 119260) 　: .、 μm , ., . : ; ; ; + + : T Q174. 75 6; T P333. 3 5　　　: A Application of Piezoelectric Micro actuator in Computer Hard disk Drive 1 1 1 1 1 - , - , , , - , LI Guo rong CHEN Da ren ZHAN G Shen S HEN Wei Y IN Qi ng rui 2 2 2 , , - BI Chao GU O Wei Z HEN G Guang de 1. Laboratory of Functional Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050, China; 2. , , 119260, ) Data Storage Institute National University of Singapore Singapore Abstract: Hard-disk driv e is o ne of the most im po rtant part s in the com put er. A new ty pe act ua to r w ith dual-t rack syst em co nt rolled by a multilay er pi ezoelect ric actuat or has been desig ned and f abricated. T he tim e dependence and f requency response o f the driv er a re measured by laser - - detec