基于MEMS技术的气体热导传感器的应用研究_王浩宇.pdfVIP

第22 卷　第7 期 传 感 技 术 学 报 V ol .22 　No.7 2009 年7 月 CHINESE JOURNAL OF SENSORS AND A CTUAT ORS Jul .2009 Applicable Research of Thermal Conductivity Sensor for Gases Based on MEMS 1 ＊ 1 2 WANG Haoy u ,CAO J ian ,AN Chenguang 1.Dep.of Physics Science and Technology , Central South University , Changsha 410083, China; 2. eij ing Huadian Yuntong P ower Technical Co Ltd, eij ing 100069, China Abstract:T raditional thermal conductivity detector has the disadvantages of low precision, low sensitivity and large temperature drift in the gases analysis.Therefore, high performance system for gases detection was designed using the M MS thermal conductivity gas sensor.In this system, a high precision double-cur- rent source was designed to provide the bridge with power,and weak signal detection (WSD)technology, temperature compensation methods and analog filter together with digital filter were used to reduce differ- ent kinds of noise.So the system has high precision and sensitivity and can accurately detect low content gas,which has overcome the disadvantages of traditional thermal conductivity detection. Key words:M MS;TCD;TCS208F;filter;noise EEACC:7 30L M MS 1 * 1 2 王浩宇 , 曹　建, 安晨光 1., 410083; 2., 100069 　:、、, M MS , 。 , , , , , , 。 M MS;TCD;TCS208F;; : :TP 1 .9　　 :A　　:1004-1699 (009)07-1050-05 　　 。 [3] 。 , M MS , (Thermal conductivity detector, TCD) , ,, , 。 , , , , μL [1] 。 。TCS208F 、、。 M MS , TCD 、 、, [2] [4-5] , , TCD 。 ,