三坐标测量机综述.doc

三坐标测量机综述 何旭栋 （上海大学 机电工程与自动化学院，上海200072） 摘要：从坐标测量机的结构形式、驱动系统、导轨与轴承、平衡机构、光栅和测头写起。在结构形式上，介绍了串联机构坐标测量机和并联机构坐标测量机两大类，并着重介绍了介绍三自由度并联机构坐标测量机的结构、特点及工作原理；在驱动系统上，对每种驱动系统的工作原理、基本结构及其优缺点进行比较，指出驱动系统应用范围，并介绍了一种新的采用组合轴承座式结构减速器的驱动系统；在导轨和轴承上，介绍了坐标测量机气浮导轨的结构特点、工作原理，并用实验分析气浮导轨对动态性能的影响；在平衡机构上，指出了坐标测量机常用的平衡机构以及每种平衡系统的工作原理和特点；在光栅上，对光栅的读数原理，安装方式进行了简单介绍，并提出了一种新型的光栅材料；在测头方面，介绍了测头的原理、分类，并对测头的误差来源进行了分析，还提出了一种原子力准接触技术，这是测头的发展趋势。最后还介绍了提高精度的“创造性”原则——误差补偿技术，分别对测量机热变形误差、弱刚度结构引起的误差和动态误差的补偿技术进行了简单介绍。 关键词：并联机构；组合轴承座式减速器；气浮导轨；原子力准接触 Summary of Coordinate Measuring Machine(CMM) HE Xu-dong (School of Mechatronic Engineering andAutomation, Shanghai University, Shanghai 200072, China) Abstract: I writed begin with the coordinate measuring machine’s structure, drive system, rails and bearings, balanced body, raster and probe. On the structural form, I introduced series and parallel institutional coordinate measuring machine, and highlighted the three degrees of freedom parallel mechanism’s structure, characteristics and working principle; On the drive system, for each types of drive system, I introduced works principle and the basic structure .Then I compared the advantages and disadvantages that drive system applications, and introduced a new bearing structure combinated gear drive system; On the bearing and rail,I introduced coordinate measuring machine working features and air-rail structure, and analysed of air-rail dynamic performance through experiment; On the balanced mechanism,I pointed out used balance and each characteristics; On the grating, I introduced the grating reading principles, installation and proposed a new type of grating material; On the probe, I described the principles of probe classification. And the error source of probe analyzed by atomic force also proposed a quasi-contact technology, which is the development trend of the probe. Finally, I introduced a the creative principle of improve the accuracy - error compensation. Respectively, thermal deformation error of the measuring