AFM氮化硅纳米探针研制.PDFVIP

第 19 卷 　第 1 期 传 感 技 术 学 报 Vol . 19 　N o . 1 2006 年 2 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS Feb . 2006 Microfabrication of Si N Nanoprobe f or AFM 3 4 1 2 3 W U Chenk ai , Z H A N G B o , W U X i anp i ng 1. S hang hai S h uang d ao I nf orm at ion S cience an d Technology Co. , L t d. , S hang hai 20 1700 , Chi na; 2 . S hang hai A J N anoscience D evelop ment Co. , L t d. , S hang hai 200237 , Chi na; 3. D ep t. of M icroelect ronics , F u d an Uni vers ity , S hang hai 200433 , Chi na Abstract : Int egrat ed p yramidal p it s u sed a s mol ds are for med on 100 orient ed silicon wafer by ani so μ t ropic et chin g . A film of silicon nit ride wit h a t hickne ss about 1 m i s depo sit ed by mean s of L PCVD and P ECVD met ho d . Cantilever i s mapp ed on t he film of t he silicon nit ride by p la sma et ching . A poli shed gla ss chip i s elect ro st atically bo nded on t he mapp ed film of t he silicon nit ride . Aft er t he sub st rat e silicon ha s been et ched away t he silicon nit ride cantilever wit h a p yramidal tip i s expo sed , w hich serve s a s a nanop ro be for mappin g nanoimage by u sing t he ato mic force micro scop e (A FM) . A f urt her di scu ssion i s con duct ed on t he shap ele ss of t he tip an d t he co mp en satio n of t he t her mal st re ss of t he silicon nit ride cantilever . A new sp ecial and efficiant de sign of t he cantilever ma sk i