MOEMS陀螺谐振腔设计.PDFVIP

2006年 11月 北 京 航 空 航 天 大 学 学 报 November摇 2006 摇 第32卷 第11期 Journal of Beijing University of Aeronautics and Astronautics Vol.32摇 No郾11 MOEMS 陀螺的谐振腔设计 冯丽爽摇 摇 刘惠兰摇 摇 贺摇 斌摇 摇 王广龙 (北京航空航天大学 仪器科学与光电工程学院,北京 100083) 摇 摇 摘摇 摇 摇 要:微光机电(MOEMS)陀螺代表着微型光学陀螺的重要发展方向,而MOEMS 谐振腔的设计是谐振式MOEMS 陀螺的核心技术.提出了一种新颖的基于微纳米加工技术的 MOEMS 空间谐振腔结构,介绍了其工作原理和系统构成.建立了谐振腔的数学模型,并利用 MATLAB软件对其重要参数进行了仿真计算及分析.为提高谐振腔清晰度及系统测量精度,优 化了谐振腔输入输出镜的技术指标,并在此基础上完成了谐振腔的微加工工艺设计.结果表 明:所设计的谐振腔清晰度可以达到346,陀螺极限灵敏度为0.25(毅)/ h,同时可以有效克服克 尔效应、背向散射、偏振等光路噪声的影响. 关摇 键摇 词:微光机电系统(MOEMS); 陀螺;谐振腔;微镜;微纳米加工 中图分类号:V241.5 文献标识码:A摇 摇 摇 摇 文 章 编 号:1001鄄5965(2006)11鄄1373鄄04 Resonatordesignfor MOEMS gyroscope Feng Lishuang摇 Liu Huilan摇 He Bin摇 Wang Guanglong (School of Instrument Science and Opto鄄electronics Engineering,Beijing University of Aeronautics and Astronautics,Beijing 100083,China) Abstract:Micro鄄opto鄄electro鄄mechanical systems(MOEMS)gyroscopeisoneof themostpotential devel鄄 opment directions of micro鄄optical gyroscope. MOEMS resonator design is the key technique of MOEMS re鄄 sonator gyroscope. A novel MOEMS spatial resonator based on micro鄄nano machining technology was put for鄄 ward. The principle and structure of the resonatorwere introduced. The mathematical modelwasestablished. Important parameters oftheresonatorwerecalculatedandanalyzedwithMATLAB. Thein鄄outmirrorofthere鄄 sonator was optimized to increase the finesse of the resonator and the sensitivity of the gyroscope. The micro鄄 fabrication technics of resonator was designed. Results demonstrate that the finesse of the resonator can be 346,the sensitivity of the gyroscope reaches 0.25(毅)/ h,and noise induced by Kerr effect,backscattering and so on can be overcome effectively. Key words:micro鄄opto鄄electro鄄mechanical systems(MOEMS);g