奈米非晶质薄膜或多层膜Nanocrystallineoramorphous.DOC

奈米非晶質薄膜或多層膜 (Nanocrystalline or amorphous multiplayered metallic glass thin films) Achievement in preparation of nanocrystalline (2-10 nm) or amorphous multiplayered metallic glass thin films, through post-annealing of multilayered elemental films, co-sputtering of two or three targets, or direct sputtering of pre-cast alloy target. The nanocrystalline (2-10 nm) or amorphous thin films have been demonstrated to be an excellent surface coating for polymers or light metals. 成果技術簡介 在非晶質合金之領域中，由於物理氣相沉積具有一高之降溫速率及相對低溫之環境，因此非常適合用於合成非晶質合金薄膜。利用鎂銅、鋯銅、鋯鈦共濺鍍或多層膜在經由熱處理之製程，能夠合成部分或完全非晶質合金薄膜。由於零缺陷之非晶質結構，