光学薄膜应力的研究-光通信技术专业论文.docxVIP

浙江人学硕I：论文膜的应力．温度曲线，并且进一步可以得到应力．温度曲线的斜率。本文研究了电子束蒸 浙江人学硕I：论文 膜的应力．温度曲线，并且进一步可以得到应力．温度曲线的斜率。本文研究了电子束蒸 发的Si02薄膜的热学性质和力学性质。研究发现：薄膜的热膨胀系数随着沉积温度的 增加而增加，但是总是小于块状材料的热膨胀系数；同时，实验发现电子束蒸发所获得 的Si02薄膜随着沉积温度的增加，其弹性模量熹减小，并且都大于块状材料的弹性 模量。 对薄膜中实际应力的组成进行研究有益于指导薄膜的镀制工艺。本文研究了薄膜沉 积温度对薄膜应力成分的影响。实验发现：对于电子束蒸发的Si02薄膜随着沉积温度 的增加，不同的基板上热应力、内应力以及由水引入的外应力都表现出不同的变化行为。 薄膜镀制后的退火处理是一种增强薄膜系统牢固性的重要手段。本文最后研究了老 化处理对薄膜中应力的影响。研究发现：老化可以改变薄膜的内应力，而几乎不影响薄 膜的热应力。 关键词：光学薄膜，残余应力，热应力，内应力，薄膜分层 lI 浙江人学硕lj论文Abstract 浙江人学硕lj论文 Abstract Optical coatings are used in semiconductor,display,communicate and SO on．During coating，there is the transformation of solid—gas—solid，and SO there are stresses．Stresses will affect the system and cause the substrate to deform and make the center wave shift．It is important to research stresses in films． Due to the film deposition process，the laRice mismatch，the thermal expansion mismatch and disfigurement，the film／substrate system is inevitably subjected to residual stresses． Stresses，special thermal stresses are the major contributor to the finite service life of microelectronic and photonic components and devices． In order to research the effect of stresses to the service life of microelectronic and photonic components and devices，we do a thorough research． We are the first to use numerical method ANSYS to analyze the effect of stress moment to the service life of the films．It shows that when the moment is negative，in the interface between the films or film and substrate，the films suffer the most tensile stress near the edge and the tensile stress decreases with the distance from the edge and tensile stress will transform compressive stress．In this case the film／substrate is easy to delaminate．If only there is a negative moment，there is the possibility for the films to delaminate and the more the number of negative moment，the more the possibility．When the stress moment is positive， in the interface between the films or film and substrate the films will suffer the most compressive stres