激光冲击波驱动微结构研究-机械电子工程专业论文.docxVIP

华 华 中 科 技 大 学 硕 士 学 位 论 文 II II Abstract As the MEMS becomes smaller, more inexpensive, more efficient, it is urgent to improve its driven system. However, the driven mode based on laser shock wave mechanics effect, with the merits of noiseless, high load capacity, safety and high efficiency, is very much in line with the development of the MEMS and worthy of further study. Firstly，in this thesis, the laser shock wave driven experiment and simulation are performed in direct ablation mode with the laser whose wavelength is 1064nm and 248nm. The experiment model is a cantilever beam, which is p