激光外差干涉绝对距离测量系统设计-测试计量技术及仪器专业论文.docxVIP

西安理工大学硕士学位论文 西安理工大学硕士学位论文 PAGE PAGE IV III III Abstract Title: Design of Laser Heterodyne Interferometric System for Absolute Distance Measurement Major: Measurement Technologies and Instrumentations Candidate: LI Zhe Signature: Supervisor: Prof. JIAO Mingxing Signature: Abstract Absolute distance measurement is one of the important research content in the high accuracy metrology area. Absolute distance measurement with large size and high accuracy has a wide application prospect. A new type of absolute distance measurement system has been designed based on analyzing heterodyne interfer