二自由度直线电机定位平台设计与特性分析.pdfVIP

ABSTRACT In order to improve the efficiency and quality of wire bonders, this paper presents a new 2-DOF positioning platform drove by linear motor. This dissertation deals with the key issues relevant to structural design, static and dynamic characteristics and dynamic modeling by means of finite element method and mechanical dynamics. As a result, a prototype machine of XY high speed precision positioning platform has been developed. The following research works have been completed. Combining mechanical design th