微热电发电机.pptVIP

A high-output-voltage micro-thermoelectric generator having high-aspect-ratio structure具有高深宽比结构的高输出电压的微热电发电机 Contents 1. Introduction 2. Design 3. Fabrication 4. Experimental details 5. Conclusion 1. Introduction Micro-thermoelectric generators (μTEGs) : Advantages Provide continuous real-time feedback and monitoring of humans conditions. Long lifetime, low acoustic noise and no moving parts. Challenges The output voltages are currently so low that they cannot operate integrated electronic devices without the assistance of dc-to-dc converters. There is a big energy loss when an up-conversionis carried out from an ultralow voltage of less than 700 mV,which is required for operating bipolar junction transistors. High-aspect-ratio (HAR) thermocouples: Increase the output voltage Temperature High thermal resistance High integration density Difficulty Thermoelectric materials are difficult to deposit as thick films and to pattern to have an HAR 目的：制造出深宽比为3.5，集成度为620TCs/cm2的热电偶 A μTEG chip having 56 thermocouples （TCs）with high thermoelectric properties of 0.16 V K–1 cm–2 and a thermal resistance of 17.1 K W–1, which is suitable for energy harvesting from a low-level heat source such as a human body. 方法：Aerosol deposition（ASD）气相淀积，Hot isostatic pressing (HIP)热等静压 2. Design 3. Fabrication 4.对齐，固定，气相淀积（ASD）Bi2Te3 纳米粉(n型) 5.换掩膜版，Bi0.3Sb1.7Te3（p） 6.热等静压（HIP） 电极：Pt/Cu/Pt/Cr 4. Experimental details 结果： 通孔直径50 μm,高度350 μm，间距150 μm 展弦比7，需要每平方厘米4400个通孔，通孔直径30μm The thermoelectric properties that the ASD film achieves are as good as those of the hot-pressed bulk materials because of the assistance of the post annealing process. 在热处理后，底部会有空洞 在热等静压处理后，空洞会减少 5. Conclusion We successfully fabricated micro-thermocouples having a HAR of 3.5 and a high integration density of 620 TCs cm–2 with high mechanical toughness. Method：Combined a photosensitive glass mold, ASD and HIP. It is expected that the proposed fabrication method will achieve a μTEG having an aspect rati