太阳能电池生产线PECVD设备三维建模与仿真优化.pdfVIP

3.2.3 ANSYS 应用软件介绍 ················································ 24 3.3 PECVD 设备的有限元模型和计算 ······································ 29 3.3.1 ANSYS 中模型的建立与网格化 ···································· 29 3.3.2 极板的有限元分析 ··················································· 38 3.3.3 侧板的有限元分析 ··················································· 42 3.3.4 下支架桥的有限元分析 ············································· 45 3.4 小结 ············································································ 48 第四章 PECVD 设备送料机构创新设计 ·····