铁电薄膜、半导体薄膜应力的X射线衍射表征与分析.pdfVIP

ABSTRACT measurement of the ZnO thin films, and the relationship of the film stress, the microstructure of the film and the film properties was discussed. We found that the growth conditions and the texture epitaxial growth of the YBCO thin films with a STO buffer layer prepared on the LAO substrate were better; in the residual stress analysis of the BST ferroelectric thin films with different ramp temperture, three-dimensional stress was foun