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Photoresist Types of Photoresist Negative Versus Positive Photoresists Photoresist Physical Properties Conventional I-Line Photoresists Negative I-Line Photoresists Positive I-Line Photoresists Deep UV (DUV) Photoresists Photoresist Dispensing Methods Spin Coat Types of Photoresists Two Types of Photoresist Positive Resist Negative Resist CD Capability Conventional Resist Deep UV Resist Process Applications Non-critical Layers Critical Layers Negative Versus Positive Resists Negative Resist Wafer image is opposite of mask image Exposed resist hardens and is insoluble Developer removes u