用于多频振动的MEMS复合式能量采集器的设计-Core.PDF

17 　6 　 Vol.17　No.6 　　　 　　　　 2009 6 　 　 　　　　　　　　　Optics and Precision Engineering 　 Jun.2009 　1004-924X(2009)06-1367-06 MEMS 任　婧, 陈旭远 (厦门大学 萨本栋微机电研究中心, 福建厦门361005) :、MEMS , , 。, MatLab/ SIMULINK , 。, 630 ～ 655 Hz , 50 kΨ, 13.46 μW。, , , 。, 。 　　:振动能量采集;复合式采集器;多频能量采集;微机电系统 :TN384;TN712　　:A Design of MEMS hybrid energy generator for multi-frequency vibration REN Jing, CHEN Xu-yuan (P en-Tung Sah ME MS R esearch Cent er, X iamen Universi ty , X iamen, 361005 Ch ina) Abstract:T e design, modeling and simulation of a novel MEMS ybrid energy generator for multi- frequency vibration is presented to meet t e requirements of portable and w ireless electronic devices for collecting energy from t e ambient environment .In t is design, piezoelectric cantilever beams and capacitors are combined for arvesting t e ybrid vibration energy.T en,an analytical model is estab- lis ed for t e multi-frequency vibration energy arvesting system and a numerical simulation met od is used to predict t e pow er output by using a M atLab/SIM U LINK .T e result s ow s t at t e structure can w ork efficiently in t e frequency ranges of 630-655 Hz, and t e pow er output can reac about 13.46 μW wit a load resistance of 50 kΨ.Based on t e result, an optimized multi-frequency ybrid energy arvester is designed in t is paper.In addition, t e Finite Element A nalysis (FEA )of t e structure is carried out to prevent t e structure failure.T e w ork implemented by t is paper s ow s t at t e next generation design w it a w ider frequency range and a ig er pow er output w it in a smal- ler structure volume is expectant. Key words:vibration energy arvesting;ybrid generator;multi-frequen