微晶矽薄膜特性分析与研制.ppt

Characterization and Fabrication of Thin-Film Microcrystalline Silicon Student : Cheng Han Tsai (蔡承翰) Advisor : Fuh Shyang Juang Ph. D. Introduction Research motivation Experiment and measurement method Results and discussion Effects of various ratios of hydrogen diluted silane gas on crystalline characteristics of microcrystalline silicon Effects of different substrate temperatures on crystalline characteristics of microcrystalline silicon Effects of various RF powers on crystalline characteristics of microcrystalline silicon Effects of different pressure on crystalline characteristics