光电半导体材料科学与技术.pptVIP

After 3 cycles Each pair of gas pulses (one cycle) produces exactly one monolayer of film, the thickness of the resulting film may be precisely controlled by the number of deposition cycles. Main types of ALD reactors Closed system chambers (most common) The reaction chamber walls are designed to effect the transport of the precursors. Schematic of a closed ALD system Ref: Technology Backgrounder: Atomic Layer Deposition, IC Knowledge LLC, 24 April 06. /misc_technology/Atomic%20Layer%20Deposition%20Briefing.pdf. Process Temperature [1] The Verano 5500? A 300-mm ALD system by Aviza Technology