MEMS宽带毫米波天线阵列研究.pdf

precisely integrated multicomponent fabrication. Based on the advantage of three dimensions micromachining technology, we intend to explore the proper way to apply the MEMS fabrication technology to the millimeter wave antenna focusing on the design of low profile planar slot antenna array. In this article, three designs of millimeter-wave broadband antenna arrays with CPW-based feeding network are presented. The Ansoft-HFSS, a kind of numerical simulation software, is performed for each design to conduct analysis and optimization. After exploring a serier of integrated fabrication process we fabricated a kind of design under the process of MEMS technology, did some tests and reached the expected target. In the first design, a 2 ×2 antenna array fed by CPW-based parallel feeding network is proposed, air bridges is used to suppress the unwanted odd mode excited in the T-junctions of CPW-based feeding network, which can guarantee low loss of the transmission network, a cutting tuning stub is introduced to achieve impedance matching, the measured operating bandwidth is 30GHz-39.6GHz with S11-10dB, considering that the center frequency is 35GHz, the relative bandwidth is 27.4%, the measured result and the simulated one match well, and the simulated antenna gain is in the range of 8.5dB and 10dB among the whole operating band. Based on the design of bi-directional radiation, antenna array with metal reflecting structure which has a circular slot in the center is given. The performance of antenna gain which is effected by the reflection patch is discussed, the simulated result shows that the antenna array radiate unidirectionally and the antenna gain is 12.2dB in the point of 35GHz, the impedance bandwidth is from 34.4GHz to 35.9GHz with S11-10dB. The third design has achieved the performance of broad band as well as the unidirection