高纯超细电子级球形石英粉研究_张军.pdfVIP

DOI:10.14106/j.cnki.1001-2028.2004.01.015 第1 期 电 子 元 件 与 材 料 Vol.23 No. 1 2004 年1 月 ELECTRONIC COMPONENTS MATERIALS Jan. 2004 信息材料及应用 高纯超细电子级球形石英粉研究 1,2 1 2 张 军 ，宋守志 ，盖国胜 （1.东北大学资源与土木工程学院，辽宁 沈阳 110006；2.清华大学材料系，北京 100084） 摘要:介绍了高纯超细球形石英粉的主要性能与用途，目前国内的研究开发现状和国际球形石英粉的生产现状。分 析比较了高频等离子球化法、直流等离子体球化法、碳极电弧球化法、气体燃烧火焰球化法、高温熔融喷射以及化学 合成球化法的工艺特点，并分析得出气体火焰球化法工艺简单，适宜大规模工业生产，产量已达500 kg/h ，是最具潜 力的球化工艺。 关键词:高纯超细粉；球形二氧化硅粉；结晶硅微粉；熔融硅微粉 中图分类号:TB383 文献标识码:A 文章编号:1001-2028 （2004）01-0048-04 Research on Spherical Quartz Powder: Electronic Grade, Super Pure and Super Fine 1 1 2 ZHANG Jun , SONG Shou-zhi , GAI Guo-sheng (1. School of Resource and Civil Engineering, Northeastern University, Shenyang 110006, China; 2. Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China) Abstract: The main characteristics and applications of the super pure and super fine spherical quartz powder are presented . Recent research and development of actuality in the China and international spherical silica powder of actuality produced are brief reviewed . Several processes for spherical super-fine powder and their features are analyzed and compared . They are: high frequency plasma spherical method, direct current plasma spherical method, carbon pole electr