SiliconOpticalModulators(硅基光调制器).pptVIP

Silicon Optical Modulators Recent developments in fabrication of High Speed Modulators J ee290f Outline Motivation Png, Reed, et al. work from Surrey. Shows basic principle and gives one of the two major design types Intel device History making device, designed and fabricated in alternate major design type. Conclusions Motivation Very clear: Si modulators means CMOS integration and using all our experience in silicon micromachining. Unfortunately, prior to 2003 the fastest Si optical modulator was ~20MHz (Lithium Niobate modulators are ~10GHz). p-i-n Si Optical Modulators 1/4 Follows the wo