光弹调制器式多通道反射差分光谱技术.docVIP

光弹调制器式多通道反射差分光谱技术 第8卷第3期 2010年5月 纳米技术与精密工程 NanotechnologyandPrecisionEngineering Vo1.8No.3 Mav2010 光弹调制器式多通道反射差分光谱技术 胡春光,孙立东,李艳宁,ZEPPENFELDPeter2,胡小唐 (1.天津大学精密测试技术与仪器国家重点实验室,天津300072; 2.奥地利约翰?开普勒大学实验物理研究所,林茨3-4040) 摘要:反射差分光谱术(RDS)是研究材料表面和薄膜光学各向异性属性的重要手段.现有的技术以光弹调制器 (PEM)式单通道测量模式为主,可以实时监测单个波长的反射差分信号,但全光谱测量则需要采用扫描波长的方 式完成,耗时长,不适合在线监测等时效性强,全光谱测量的应用.在研究基于光弹调制器的多通道反射差分光谱 仪的技术实现的基础上,结合虚拟仪器技术,高速多通道同步采集卡和数字锁相放大算法,提出一种新的多通道测 量构架.实验表明,新方法在全光谱范围内测量信号的标准偏差小于10～,在仪器开发上具有纽合灵活,扩展性好 等优点. 关键词:反射差分光谱术;光弹调制;多通道并行测量;同步采集卡;数字锁相放大算法 中图分类号:TH744.2;0433.1;TP274.2文献标志码:A文章编号:1672-6030(2010)03-0195-06 Multi-ChannelPhotoelasticModulatorBasedReflectance DifferenceSpectroscopy HUChun—guang,SUNLi.dong,LIYan—ning,ZEPPENFELDPeter,HUXiao—tang (1.StateKeyLaboratoryofPrecisionMeasuringTechnologyandInstruments,TianjinUniversity,Tianjin300072,China; 2.InstituteofExperimentalPhysics,JohannesKeplerUniversity,LinzA4040,Austria) Abstract:Reflectancedifferencespectroscopy(RDS)isanimportanttoolforopticalanisotropycharac— terizationofsurfacesandthinfilms.Themostlyusedphotoelasticmodulator(PEM)basedsingle—channel RDspectrometryisgoodatrealtimemeasurementatonewavelength,butitsspectralmeasurementby meansofscanningwavelengthtakestoolongtimetosatisfywithtime--criticalspectrumrequiredapplica.. tions,suchasin—situmonitoringorunrepeatablemeasurement.Anapproachwaspromotedformulti. channelmeasurementusingvirtualinstrumentationtechnologyforgeneralinstrumentcontrol,ahighspeed synchronizeddataacquisitioncardformulti—channelparallelacquisition, anddigitallock—inamplifieral— gorithmforprecisedataprocessing.Comparingtoacommercialsingle—channelPEMbasedRDspectrom— eter,thenewdesignnotonlyoffersstandarddeviationoftheRDsignallessthan10～inallwavelengths. butalsoisadvancedinhardwaredesignwiththeabilityofeasyreconstructionandthepossibilityforfur— therexpansion. Keywords:reflectancedifferencespectroscopy;photoelasticmodulation:multi—channelparalle1measure. ment;synchronizeddataacquisitioncard;digitalluck—inamplifieralgorithm 收稿日期:2