半导体器件原理-USTC.ppt

* * * * * * * * * * * * Semiconductor Devices * * Semiconductor Devices * * Semiconductor Devices * * Semiconductor Devices * CNT is a tubular form of carbon with diameter as small as 1 nm. Length: few nm to cm. CNT is configurationally equivalent to a two dimensional graphene sheet rolled into a tube. CNT exhibits: Carrier mobility ~ 100,000 cm2/Vs Young’s modulus over 1 Tera Pascal, as stiff as diamond; 3. Tensile strength ~ 200 GPa. CNT can be metallic or semiconducting, depending on chirality. * Semiconductor Devices * CNT FETs Gate 8nm HfO2 SiO2 p++ Si Pd Pd CNT Delft : Tans, et al.,