半导体通讯之secs文档.docVIP

b\????L???? SECS I/II GEM ???§???? 870508@.tw b\??x? CIMComputer Integrated Manufacturingypv???D ?L????? SECSSEMI Equipment Communication Standardb\??ū ???????2ˉ SEMISemiconductor Equipment and Materials Internationalb\??ū???Ο??)[1]???b\??x????? ?a???D??οΩ??H???D?ypΩ???Β?B?? ???D?L???????????L~??D????+?xΩ??Λ ? SECS ??L SECS MessageStream Function ?ρ?I CIntegrated Circuitˉ HDLHardware Description Language ??ǜ?????yá??????b\?????a??IC ˉ??? n?ǒ???Ω?????Τ????Ωb\??x?b\??????? +???????D??????ǒ??0?+??ΩH?D?a Ω??IH?t???D???xΩ??????Q??ú? SEMI ? SECS ΩD????? 1. ?xΛū(Equipment Status) 2. ?x???(Equipment Control and Diagnostics) 3.??Λū(Material Status) 4.???(Material Control) 5.?~?\(Exception Handling) 6.·???(Data Collection) 7. ?xq??￡Process Program Management, Recipe 8.?????(Control Program Transfer) 9.????(System Errors) 10.T????(Terminal Services) 11.D?????(Host File Services) 12.????(Wafer Mapping) 13.·?ü??(Data Set Transfers) 14.Κ???(Object Services) 15.?)?￡(Recipe Management) 16.???￡?￡(Processing Management) 17.3????·?(Subsystem Control and Data) ? 1 ?? 20 ? .tw/ ??D???_?]?Ω??3??? 1.??|???(Establish Communication)D???x|??? 2. ?xq??)??xΩ??Ω?????? 3.???(Remote Control)ˉD?D?O?x??ǖ??ΡL q? 4.????(Error Message)??D????Ω Stream Function ? ???? 5.???(Alarm Message)?x??????D? 6.?ū????(Dynamic Event Report)?xD?????Λ?? ??D? 7.ò?·???(Variable Data Collection)???x?????Φ ?òL·? 8.Λū·???(Status Data Collect ion)???+?xLq?Λū 9.?????????????ΚΩ?? 10.????(Spooling)D???xL?????I?Ω??_?? ?ΩΛ??xζ??? Spooled Ω???????? ??????ˉD?H S6F23??Β??I???_?x?? ?XΩ??D?.i?S2F43?????????Ω? ?? Stream oneS1FxH??Spooled?D??? Spooling\???????I??? Spooled Ω Steam Function?ζ??????_??D???????H2 ?????????D? ? SECS Ω??I?????HHíΩ Stream NumberΠ?HíΩ Function Number??o??H Stream Number??Hí????TH Function Number??????λΩ???? Stream Number ? 0~127 Function Number ? 0~255?H Sn,Fm??ò?+? SEMII??ǒü?` ???)???o ?Steam Function?? ???? ?????? Stream Number (n) Function Number (m) ?xΛū 1 0~20 ?x??? 2 0~50 ??Λū??Λū3 0~26 ???