材料科学中电子显微镜的各种技术介绍.pptx

Part III Analytical Electron Microscopy in Materials Science1.Introduction2.Image mode in AEM3.Microanalysis in AEM 3.1 X-ray Energy Dispersive Spectroscopy (EDS) 3.2 Electron Energy Loss Spectroscopy (EELS) 3.3 Microdiffraction 3.4 Convergent beam diffraction 1、Introduction1.Signals generated in the interaction between the incident high energy electron beam and the thin crystalline specimen2.How to form a probe3.Relationship between TEM, SEM and AEM 3.1 TEM Image mode Diffraction mode 3.2 SEM Image mode: SE, BSE, X-Ray Mapping Microanalysis: WDS, EDS 3.3 AEM Imaging mode: TEM, STEM, SEM, Map