硕士论文-基于非谐振原理的硅微机械陀螺仪的结构设计研究.docVIP

东南大学 硕士学位论文 基于非谐振原理的娃微机械陀螺伩的结构设计研究 姓名：何小磊 申请学位级别：硕士 专业：精密伩器与技术 导教师：苏岩Abstract Micro-machined gyroscopes have a variety of applications in many fields due to their small sizelight weight and low cost Many efforts have been spent in improving the sensitivity in past years. In the dissertation, a new micro-machined vibratory gyroscope, based on non-resonance principle, is investigated, including the operating principle, design and fabrication, packaging and measurement of the device. The details are as following: It describes the basic operating principle of the traditional micro-machin