X射线光电子能谱-培训班.pptVIP

* * Multiple small samples or sample features can be pre-located for analysis and measured in an automated fashion to provide the statistical analysis needed to draw the correct conclusions from the measured data. In the example shown above, multiple Al bond pads from good and bad product wafers were measured automatically in an attempt to understand the difference between good and bad wafers. Sample Positioning Station and secondary electron images provide the tools needed to pre-locate sample features with optical or secondary electron images. * Representative spectra from bond pads on goo