ThinFilm 资料(新人版)教学提纲.pptVIP

ThinFilm 资料(新人版);PVD(Physical Vapor Deposition);準直管式;LTS(Long Throw Sputter);離子化式;Sputter Etching:RF power(high/low frequency);8A Sputter Machine List;Sputter Chamber Configuration;Front;Front;Buffer Chamber 內部構造;Chamber 內部構造;Chamber 內部構造; ;機台附屬配備 ;Neslab;CVD(Chemical Vapor Deposition);化學沉積比較物理沉積;CVD 種類:;介電材料CVD ;8A 介電材料CVD Machine List;介電材料---Thermal CVD;Front;機台名稱;Front door 內部;Transfer Chamber 內部構造;介電材料---PECVD ;Front;Machine Side;介電材料---Spin-on Glass CVD ;Front;介電材料--- High Density Plasma CVD ;Front;Chamber wafer 破片;導電材料 CVD ;8A Metal CVD Machine List;Front;機台名稱;Chamber 內部構造;機台附屬配備 ;機