ic工艺几种ic工艺流程.pptxVIP

第五单元：集成技术简介;PowerPoint 演示文稿;Major Fabricati;CMOS Process Fl;Model of Typica;Simplified Sche;Photolithograph;Simplified Sche;Simplified Sche;Simplified Sche;Thin Film Metal;Simplified Sche;Polish Bay in a;CMOS Manufactur;CMOS Manufactur;n-well Formatio;p-well Formatio;STI Trench Etch;STI Oxide Fill;STI Formation;Poly Gate Struc;n- LDD Implant;p- LDD Implant;Side Wall Space;n+ Source/Drain;p+ Source/Drain;Contact Formati;LI Oxide Dielec;LI Metal Format;LI Oxide as a D;Via-1 Formation;Plug-1 Formatio;SEM Micrographs;Metal-1 Interco;SEM Micrographs;Via-2 Formation;Plug-2 Formatio;Metal-2 Interco;Full 0.18 mm CM;SEM Micrograph ;Wafer Electrica;PowerPoint 演示文稿;PowerPoint 演示文稿;PowerPoint 演示文稿;PowerPoint 演示文稿;PowerPoint 演示文稿;PowerPoint 演示文稿;Model of Typica;Simplified Sche;Simplified Sche;Thin Film Metal;Contact Formati;SEM Micrographs;PowerPoint 演示文稿