HM EGUN-6 电子束蒸发源.docxVIP

HM EGUN-6 电子束蒸发源 HM EGUN-6 电子束蒸发源 e-Guns for Thin Film Optical Coatings 薄膜和光学镀膜电子枪 Hanks HM2TM e-Gun ? Patented, award-winning, modular magnet beam focusing system; higher efficiency, improved beam collimation, no beam ”curl ” 一流的专利产品，模块化的永磁电子束聚焦系统；更高的效能，改良的束瞄准，电子束无扭曲 ? Improved emitter and sweep coil assemblies 改良的束发射器和扫描线圈总成 ? 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling ” 0-200Hz 扫描，蒸发的重复性、均匀性好，无“沟道” ? Precise and stable evaporation rates to as low as 1-2 A/sec 精确和稳定的蒸发速率，可低至1-2 A/秒 ? 35% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically large guns. 比传统的蒸发源小35%，但能提供相同的坩埚容量和蒸发速率， 可使用大容量的电子枪电源 ? High and Ultra High Vacuum compatible 兼容高真空或者超高真空 ? Accessories 相应的配套设备 ? Crucible liners 可用坩埚内衬 Hanks HM2Triad e-Gun Hanks HM2 e-Guns are manufactured protected under one or more of the following patents: 4,835,89; 4,891,821; 4,947,404 DE TECHNOLOGY Models 型号： ? 6-20kW 7-156cc crucible volumes 功率6-20千瓦，坩埚容量7-156毫升 ? Hydra 10 crucible with 6 emitters, simultanuous/ sequential evaporation of up to six materials Hydra 10个坩埚6个束发射器，同时或连续蒸发多达六种材料 ? Triad 3 crucible source Triad 3个坩埚源 ? Twin 2 crucible source Twin 2个坩埚源 ? Single 1 crucible source Single 1个坩埚源 Hanks HM2 Hydra-2 Rotary 旋转式 ? 6-10 kw 7-15 cc crucible volumes 功率为6-10千瓦，坩埚容量7-15 毫升 ? Four crucible 4个坩埚源 Hanks HM2 Single Crucible e-Guns UHV Compatible Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr. 金属密封，完全兼容超高真空，真空度可达2 x 10 Torr Hanks HM2 Multiple Crucible Rotary e-Gun Modular Magnets / 模块化的磁铁 The unique modular magnet concept is incorporated in the multiple crucible rotary Hanks HM2 e-Gun design. This concept makes possible a very compact unit. All of the Hanks HM unique features are incorporated in this model. 在Hanks HM电子枪里引入了独有的模块化磁铁概念，使Hanks HM电子枪的结构更加紧