近代分析实验原理：第十五课-卢瑟福背散射.pptVIP

* Bi0.95Y0.05FeO3 (target compositions) film, the measured Y concentration is 5.2%. Bi Y Fe Ni La Si O * Determine the depth profile of concentration : 多元素薄靶 下图为多元素薄靶的背散射图 * * * * Rutherford backscattering Spectrometry/channeling Check the damage in crystals upon ion implantation Verify the epitaxy of thin films on substrates Lattice location of impurities in semiconductors Depth profile of strain in semiconductors * Ψ d energy counts * 氧 * 退道：入射粒子受到移位原子的向前的小角度弹性散射，使沟道粒子以大于沟道临界角的角度散射，这一过程称之为退道。 * 沟道技术的应用 对于表面重构，使得第二层原子没有被屏蔽，表面峰强度是理想晶体的两倍。 对于表面弛豫，原子有沿表面法向的位移，如果垂直入射，表面峰等于一个单原子层的强度，如果斜入射，则会得到强得多的表面峰。 吸附物在表面原子正上方，削弱了衬底的表面峰，比理想晶体的表面峰要弱得多。 * 退道的影响 * 对于沟道粒子，可以认为在晶格上的替位杂质原子是不可见的。 * 定向谱的杂质峰的面积不很小 * 沟道粒子沿不同晶轴入射，有不同的沟道效应，可以确定杂质原子的晶格位置。 * * RBS channeling application: measure the damage Bulk region Surface region Lattice damage accumulation after implantation of 180 keV Fe ions (S.Zhou et al., J. Appl. Phys. 103, 023902 (2008)) This is due to the strong dynamic annealing effect, i.e., migration and interaction of defects during ion implantation * * 20世纪初汤姆生提出了原子的枣糕式模型：原子是一个球体，正电荷均匀分布在整个球内，而电子却象枣糕里的枣子那样镶嵌在原子里面. 1957年，茹宾（Rubin）首次 利用质子和氘束分析收集在 滤膜上的烟尘粒子的成份 * 这里就有一个问题了，为什么对轻元素有更高的质量分辨率，但是RBS适合探测重元素，而对轻元素不灵敏？这主要是由于重元素的原子对入射离子的散射强于轻元素的原子，因而对重元素更加灵敏。 The mass resolution for heavier elements can be improved by using higher incident energies or heavier incident projectiles. However, the deteriorated energy resolution of solid state detectors for heavier ions (see Section 5) generally compensates the increased energy separation, and a gain in mass resolution by using heavier incident ions is only obtained with magnetic or electrostatic spectrometers. With solid state detectors the optimum mass resolution is obtained for projectiles with mass M1 in the range 4–7. * Generally, the accuracy of calculated stopping powers for incident protons and 4He ions is about 5%, and about 10% for heavier ions. However, it should be noted that for some elements (especially carbon and silicon) larger de