工程表面粗糙度两用测量系统.docVIP

工程表面粗糙度两用测量系统 摘　要：介绍了一种新型工程表面粗糙度两用测量系统的设计原理、仪器结构及测试结果。该系统可采用接触法和非接触法两种测量方式，接触法测量范围达±100μm，最小分辨率为0．005μm；非接触法测量范围达±250μm，最小分辨率为0．01μm。 关键词：表面粗糙度　接触测量法　聚焦探测法 Synthesis Measuring System for Engineering Surface Roughness Xie Feng et al Abstract：The principle，structure and experiment results of a surface roughness synthesis measuring system are introduced．The system can be operated by contact or non-contact measuring method．The maximum vertical measuring range by the contact method can reach ±100μm with a minimum resolution of 0．005μm and that by the non-contact method can reach ±250μm with a minim