2011-0610 MEMS技術介紹参考课件.pdfVIP

MEMS Technology 6/10/2011 1 Outline MEMS Background MEMS Market Analysis MEMS Package (Past, Now, and Future) MEMS Process Equipment 2 Outline MEMS Background MEMS Market Analysis MEMS Package (Past, Now, and Future) MEMS Process Equipment 3 What is MEMS? MEMS is Micro-Electro-Mechanical System (USA) Micro-Sy