参考学习 中学课件材料分析方法043Spatial Resolution and Minimum Detection.pdfVIP

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SpatialResolutionandMinimumDetection

CHAPTERPREVIEW

OftenwhenyoudoX-rayanalysisofthinfoilsyouareseekinginformationthatiscloseto

thelimitsofspatialresolution.Beforeyoucarryoutanysuchanalysisyouneedtounder-

standthevariouscontrollingfactorsandinthischapterweexplainthese.Minimizingyour

specimenthicknessisperhapsthemostcriticalaspectofobtainingthebestspatialresolu-

tion,sowesummarizethevariouswaysyoucanmeasureyourfoilthicknessattheanalysis

point,butthequalityoftheTEM-XEDSsystemisalsoimportant.

AconsequenceofgoingtohigherspatialresolutionisthattheX-raysignalcomesfroma

muchsmallervolumeofthespecimen.Asmallersignalmeansthatyou’llfinditverydifficult

todetectthepresenceoftraceconstituentsinthinfoils.Consequently,theminimummass

fraction(MMF)inTEMisnotassmallasmanyotheranalyticalinstrumentswhichhave

poorerspatialresolution.Thistrade-offistrueforanyanalysistechnique,andsoitisonly

sensibletodiscusstheideasofspatialresolutioninconjunctionwithanalyticaldetection

limits.We’llmakethisconnectioninthelatterpartofthechapter.Despitetherelatively

poorMMF,itispossibletodetectthepresenceofjustafewatomsofoneparticularelement

iftheanalyzedvolumeissmallenough,andsotheTEMactuallyexhibitsexcellentminimum

detectablemass(MDM).WiththelatestadvancesinXEDSandTEMtechnology,partic-

ularlyCscorrection,X-rayanalysiswithatomic-columnresolutionandsingle-atomdetec-

tionisnowfeasiblei