GB/T 44919-2024微机电系统(MEMS)技术　薄膜力学性能的鼓胀试验方法.pdf

ICS

31.080.99

CCS

L59

中华人民共和国国家标准

GB/T44919—2024/IEC62047﹘17:2015

微机电系统（MEMS）技术

薄膜力学性能的鼓胀试验方法

Micro-electromechanicalsystems(MEMS)technology—

Bulgetestmethodformeasuringmechanical

propertiesofthinfilms

（IEC62047-17:2015,Semiconductordevices—Micro-electromechanical

devices—Part17:Bulgetestmethodformeasuring

mechanicalpropertiesofthinfilms,IDT）

2024-11-28发布2024-11-28实施

国家市场监督管理总局

发布

国家标准化管理委员会

GB/T44919—2024/IEC62047﹘17:2015

目次

1

范围

1

··································································································

2

规范性引用文件

1

······················································································