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ICS31.080.99
CCSL59
中华人民共和国国家标准
GB/T44515—2024/IEC62047⁃30:2017
微机电系统（MEMS）技术
MEMS压电薄膜机电转换特性测量方法
Micro⁃electromechanicalsystem（MEMS）technology—Measurementmethodsof
electro⁃mechanicalconversioncharacteristicsofMEMSpiezoelectricthinfilm
（IEC62047⁃30：2017，Semiconductor—Micro-electromechanicaldevices—
Part30：Measurementmethodsofelectro⁃mechanicalconversion
characteristicsofMEMSpiezoelectricthinfilm，IDT）
2024⁃09⁃29发布2025⁃01⁃01实施
国家市场监督管理总局
发布
国家标准化管理委员会
GB/T44515—2024/IEC62047⁃30:2017
目次
前言··························································································································Ⅲ
1范围·······················································································································1
2规范性引用文件········································································································1
3术语和定义··············································································································1
4MEMS压电薄膜试验台······························································································1
4.1总则·················································································································1
4.2功能模块和组件··································································································3
5被测薄膜·················································································································4
5.1通则··············································································································
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