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A/D
analogtodigital
AA
atomicabsorption
AAS
atomicabsorptionspectroscopy
ABC
activity‐basedcosting
ABM
activity‐basedmanagement
AC
alternatingcurrent;activatedcarbon
ACF
anisotropicconductivefilm
ACI
after‐cleaninspection
ACP
anisotropicconductivepaste
ACT
alternativecontroltechniques;actualcycletime
ADC
analog‐to‐digitalconverter
ADE
advanceddevelopmentenvironment
ADI
after‐developinspection
ADT
applieddiagnostictechnique
ADTSEM
Apply/DevelopTrackSpecificEquipmentModel
AE
atomicemission;acousticemission;absoluteellipsometry
AEC
advancedequipmentcontroller
AECS
AdvancedEquipmentControlSystem;AutomatedEquipmentControlSystem
AEI
after‐etchinspection;automatedequipmentinterface
AEM
analyticalelectronmicroscopy
AES
Augeremission/electronspectroscopy
AFM
atomicforcemicroscopy
AFP
abrasive‐freepolish
Ag
silver
A‐GEMTF
AdvancedGEMTaskForce
AGV
automatedguidedvehicle
AHF
anhydroushydrogenfluoride
AHU
airhandlingunit
AIR
automatedimageretrieval
Al
aluminum
ALD
atomiclayerdeposition
ALE
atomiclayerepitaxy;applicationlogicelement
ALS
advancedlightsource;advancedlow‐powerSchottky
AMC
airbornemolecularcontamination
AMHS
automatedmaterialhandlingsystem
AMT
advancedmanufacturingtechnology
AMU
atomicmassunit
ANN
artificialneuralnetwork
ANOVA
analysisofvariance
AOV
air‐operatedvalve
AP
adhesionpromoter
APA
advancedperformancealgorithm
APC
advancedprocesscontrol
APCD
add‐onpollutioncontroldevice
APCFI
AdvancedProcessControlFrameworkInitiative
APCVD
atmosphericpressurechemicalvapordeposition
APEC
advancedprocessequipmentcontrol
API
applicationprogramminginterface;atmosphericpressureionization
APM
atmosphericpassivationmodule;acousticplatemode
APRDL
AdvancedProductsResearchandDevelopmentLaboratory
aPSM
attenuatingphase‐shiftmask
AQI
ACCESSqueryinterface
AQL
acceptablequalitylevel
Ar
argon
AR
aspectratio
ARAMS
AutomatedReliability
ARC
antireflectiv
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