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国外顶级PECVD公司的培训.pptxVIP

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VacuumFundamentalsBasicVacuumandLeakDetectionUsethebasicterminologyforvacuumtechnologyExplainwhatavacuumisExplainwhyavacuumisnecessaryforsomeprocess

VacuumFundamentalsDiscussthetwoimportanttypesofgasflowDescribetheeffectoftemperatureandpressureonavolumeofgasUsetheterm“throughput”todescribevacuumsystem,pumpoperationandgasloadBasicVacuumandLeakDetection

VacuumcomesfromtheLatin“vacua”Empty**Avacuumisonlyreally..onlypartiallyempty.BasicVacuumandLeakDetection

?Vacuum!EvangelistaTorricelliBasicVacuumandLeakDetection

ForceForceEqualizedBasicVacuumandLeakDetection

ForceForceUnderPressure!BasicVacuumandLeakDetection

ForceUnderVacuum!ForceForceBasicVacuumandLeakDetection

Howisavacuumproduced?BasicVacuumandLeakDetection

BasicVacuumandLeackDetectionVacuumPumpWorkChamber

TypesofVacuumRoughVacuum(approx.759to1Torr)BasicVacuumandLeakDetection

TypesofVacuumHighVacuum(approx.1x10??to1x10??Torr)MediumVacuum(approx.1Torrto1x10??Torr)BasicVacuumandLeakDetection

TypesofVacuumRoughtoMediumVacuum(approx.759to1x10??Torr)UltrahighVacuum(Lessthan1x10??Torr)HighVacuum(approx.1x10??to1x10??Torr)WHATISATORR?BasicVacuumandLeakDetection

76cm76cm=760mm760Torr(1mmofHg=1torr)1torr=1000milliTorr1millitorr=BasicVacuumandLeakDetection1x10??Torr

AtmosphericPressure(Standard)=PressureEquivalents0 psig(gaugepressure)14.7 poundspersquareinch(psia)29.92 inchesofHg760 mmofmercury760 torr760,000 milltorrormicrons101,325 pascal1.013 bar1013 millbarBasicVacuumandLeakDetection

RoughVacuum HighVacuum UltrahighVacuumWhereisVacuumUsedFoodprocessingEvaporationFreezedryingDistillationSputteringElectricalconductionTubeprocessingHeattreatingIntegratedcircuitmanufactureDecorativecoatingParticleaccelerationChemistryresearchE-beamweldingVapordepositionIonimplantationInsulation(therm

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