高稳定性单晶硅压力（差压）变送器的实现.pdfVIP

高稳定性单晶硅压力(差压)变送器的实现郝正宏,等

高稳定性单晶硅压力(差压)变送器的实现

lmplementationoftheMonocrystallineSiliconPressure/DifferentialPressure

TransmitterswithHighStability

郝正宏王徐坚李俊毅汤俐敏

(上海洛丁森工业自动化设备有限公司,上海201109)

摘要:当前高稳定性压力(差压)变送器在自动化领域的应用越来越重要,如何发展具备中国自主知识产权的高稳定性变送器是中

国本土变送器制造厂商面临的一个非常严峻的问题。从超稳型单晶硅原理芯片的选择、超稳型单晶硅硅片的无应力封装、回程误差

的消除、静压误差的减弱和补偿、仪表量程比的拓宽、接液面的特殊处理以及超高温测量等诸多技术方面,详细说明了提升高稳定性

压力(差压)变送器全性能、准确度等级和可靠性的技术和措施,弥补了国外高端压力(差压)变送器对中国市场的技术垄断。

关键词:单晶硅压力传感器过载保护回程误差静压补偿超高温远传

中图分类号:TP202+.2文献标志码:ADOI:10.16086/j.cnki.issn1000-0380.201504024

Abstract:Atpresent,highstabilitypressure/differentialpressuretransmittersbecomemoreandmoreimportantinautomationapplicationfield.

ThelocalChinesemanufacturersoftransmittersarefacingaveryseriousmissionofhowtodevelopthetransmitterswithhighstabilityand

independentintellectualpropertyrights.Forenhancingtheentireperformance,accuracylevelandreliabilityofthehighstabilitypressure

(d/p)transmitters,varioustechnologiesandmeasuresaredescribedindetail,includingtheselectionofultra-stabletypemonocrystalline

siliconchips;thestress-freeencapsulationofultra-stabletypemonocrystallinesiliconchips;eliminationofthehysteresiserror;reductionand

compensationofthestaticpressure;broadeningtheturndownratiooftheinstrument;specialtreatmentofliquidsurfacecontacted;and

measurementofsuper-hightemperature,etc.Theimplementationresiststhetechnicalmonopolyofforeignhigh-endpressure(d/p)transmitters

ontheChinesemarket.

Keywords:MonocrystallinesiliconpressuresensorOverloadprotectionHysteresiserrorStaticpressurecompensation

Super-hightemperatureremotetransmission

阻原理的中高端压力(差压)变送器规模化生产线。

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