基于相位恢复的非球面光学元件测量技术研究.docxVIP

基于相位恢复的非球面光学元件测量技术研究

关键词：非球面光学元件；相位恢复；测量技术；光学系统；高精度

Abstract:Withtherapiddevelopmentofopticaltechnology,non-sphericalopticalelementshavebeenwidelyusedinprecisioninstrumentsandhigh-enddisplaydevices.Traditionalnon-sphericalopticalelementmeasurementtechniquesarelimitedbyaccuracyandefficiency,whichcannotmeettherequirementsofmodernopticalsystemsforhighprecisionandhighspeed.Thisarticleaimstoimprovemeasurementaccuracyandreducemeasurementcostsbyproposingaphaserecovery-basednon-sphericalopticalelementmeasurementtechnique.Thisarticle