微电子技术论文s10854-016-5339-y.pdfVIP

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JMaterSci:MaterElectron(2016)27:11934–11939

DOI10.1007/s10854-016-5339-y

Structural,opticalanddielectricpropertiesofnon-crystalline

LaTiO3filmspreparedbyelectron-beamevaporation

11

ChenYang•JunqiXu

Received:25April2016/Accepted:9July2016/Publishedonline:20July2016

SpringerScience+BusinessMediaNewYork2016

AbstractThemicrostructures,electricalandopticalstructuralmixedoxideshaveattractedgreatinterestfor

propertiesofnon-crystallineLaTiO3filmsdepo

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